The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Nov. 23, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Ilya Bezel, Mountain View, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Kenneth P. Gross, San Carlos, CA (US);
Matthew Panzer, San Jose, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Lauren Wilson, San Jose, CA (US);
Joshua Wittenberg, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.