The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Aug. 12, 2015
Nikon Metrology NV, Leuven, BE;
Stephen M. Fletcher, Rickmansworth, GB;
NIKON METROLOGY NV, Leuven, BE;
Abstract
Disclosed is an X-ray beam collimator. In one configuration, the collimator comprises an X-ray collimating portion having an X-ray transmission aperture formed therein. In one configuration, an electron absorbing portion is positioned in or arranged to overlie the X-ray transmission aperture. In one configuration, the X-ray collimating portion has a thickness in a direction through the aperture greater than a thickness in the same direction of the electron absorbing portion. In one configuration, the collimator comprises an x-ray collimating portion made of a conducting first material having an x-ray transmission aperture formed therein. In one configuration, an electron absorbing portion made of a conducting second material is arranged to plug or cover the x-ray transmission aperture. In one configuration, the first material is relatively more radiodense than the second material. Also disclosed is an x-ray beam apparatus, a method of reducing ozone generation and a structure manufacturing method using the disclosed collimator.