The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Apr. 07, 2017
Fei Company, Hillsboro, OR (US);
Tenzile Berkin Cilingiroglu, Fremont, CA (US);
Neel Leslie, San Jose, CA (US);
FEI Company, Hillsboro, OR (US);
Abstract
In one embodiment, a method for improving the alignment of CAD data to optical imaging data, such as LSM and LVI images of integrated circuits is disclosed. Image reconstruction techniques are applied to optical images, such as laser voltage images (LVI), laser scanning microscope (LSM) images, or emission images, to produce reconstructed images which may have higher resolution, increased signal-to-noise, or other enhancements. Multiple CAD pattern layers are processed to generate second CAD images more closely corresponding to the appearance of the reconstructed images. Alignment of the reconstructed images to the second CAD data may be substantially more accurate and precise than alignment of the initial optical images to the CAD data—in some cases this improvement may make the difference between a successful alignment and a failed alignment.