The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

Jan. 31, 2018
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Frank Hille, Munich, DE;

Andre Brockmeier, Villach, AT;

Francisco Javier Santos Rodriguez, Villach, AT;

Daniel Schloegl, Villach, AT;

Hans-Joachim Schulze, Taufkirchen, DE;

Assignee:

INFINEON TECHNOLOGIES AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 29/06 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/225 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0638 (2013.01); H01L 21/0243 (2013.01); H01L 21/02378 (2013.01); H01L 21/02381 (2013.01); H01L 21/02634 (2013.01); H01L 21/02658 (2013.01); H01L 21/2252 (2013.01); H01L 21/30608 (2013.01); H01L 21/78 (2013.01); H01L 21/7806 (2013.01);
Abstract

Epitaxy troughs are formed in a semiconductor substrate, wherein a matrix section of the semiconductor substrate laterally separates the epitaxy troughs and comprises a first semiconductor material. Crystalline epitaxy regions of a second semiconductor material are formed in the epitaxy troughs, wherein the second semiconductor material differs from the first semiconductor material in at least one of porosity, impurity content or defect density. From the epitaxy regions at least main body portions of semiconductor bodies of the semiconductor devices are formed.


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