The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

Feb. 27, 2018
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Jasper Wesselingh, Moettingen, DE;

Axel Lorenz, Meissen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); H02K 41/035 (2006.01); H01F 7/126 (2006.01); H02K 3/42 (2006.01); H01F 7/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70825 (2013.01); G03F 7/70008 (2013.01); G03F 7/70258 (2013.01); G03F 7/70266 (2013.01); G03F 7/70383 (2013.01); G03F 7/70758 (2013.01); G03F 7/70841 (2013.01); H01F 7/126 (2013.01); H02K 3/42 (2013.01); H02K 41/0356 (2013.01); H01F 7/1607 (2013.01);
Abstract

An electromagnetic drive includes a stator, having a stator holder and an actuating element which is movable by electromagnetic interaction with the stator. The stator holder has at least two electrically conductive paths running separately from and adjacent to one another. In each case, the two paths running separately from and adjacent to one another form a path pair, and the paths of the path pair are connected to one another in electrically conductive fashion at their respective ends. The paths of the path pair are arranged such that the stator and/or the actuating element induces eddy currents acting in opposite directions in the paths.


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