The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Apr. 21, 2011
Ivan Ivanov, Aachen, DE;
Taoufik Mbarek, Bietigheim-Bissingen, DE;
Mathias Huesing, Aachen, DE;
Burkhard Corves, Hergenrath, DE;
Ivan Ivanov, Aachen, DE;
Taoufik Mbarek, Bietigheim-Bissingen, DE;
Mathias Huesing, Aachen, DE;
Burkhard Corves, Hergenrath, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilized area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.