The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Dec. 27, 2015
Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;
Jingchao Qi, Shanghai, CN;
Feibiao Chen, Shanghai, CN;
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD., Shanghai, CN;
Abstract
Disclosed is an adaptive groove focusing and leveling device for measuring the height and the inclination of the surface of a measured object (). The measured object () is provided with cyclic grooves () in the surface and supported by a moving table; the focusing and leveling device sequentially comprises an illumination unit, a projection unit, a detection unit and a detector (); the measured object () is positioned between the projection unit and the detection unit along the light path, the projection unit comprises a projection slit () and is used for forming a plurality of measuring points () on the measured object (), and each measuring point () comprises at least three measuring child light spots (), wherein the at least three measuring child light spots () are arranged at unequal intervals, so that when the plurality of measuring points () are projected to the surface of the measured object (), at least two of the at least three measuring child light spots () of each measuring point () can be positioned outside the grooves (), and then the height and the inclination of the surface of the measured object () are measured.