The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

Nov. 14, 2014
Applicant:

Aixtron SE, Herzogenrath, DE;

Inventors:

Pierre-Arnaud Bodin, Buckinghamshire, GB;

Mark Edlef Oppen, Hertfordshire, GB;

Keith Allen, Cambridgeshire, GB;

Hugo Silva, Aachen, DE;

Assignee:

AIXTRON SE, Herzogenrath, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); H05B 3/12 (2006.01); H05B 3/26 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); C23C 16/46 (2013.01); H05B 3/12 (2013.01); H05B 3/265 (2013.01); H05B 2203/002 (2013.01); H05B 2203/014 (2013.01); H05B 2203/016 (2013.01); H05B 2203/022 (2013.01); H05B 2203/037 (2013.01);
Abstract

A device includes at least a first electrically conductive contact plate, at least a second electrically conductive contact plate and a plurality of heating elements connected electrically in parallel. Each of the plurality of heating elements includes at least one resistance heating unit, respectively. Each of the heating elements is connected by means of a first connecting contact to the heating elements is connected by means of a first connecting contact to the first contact plate and by means of a second connecting contact to the second contact plate, in which both contact plates lie in a common first plane. The resistance heating units are arranged along a spiral or arched line around a center of the device. To expand the service life of the device at reduced manufacturing costs, a plurality of heating units are arranged consecutively or nested with each other along the ached or spiral line, and both the first and second contact plates comprise interlocking comb-like contact extensions.


Find Patent Forward Citations

Loading…