The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Oct. 03, 2014
Applied Materials, Inc., Santa Clara, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Robert T. Trujillo, San Jose, CA (US);
Kevin Griffin, Livermore, CA (US);
Garry K. Kwong, San Jose, CA (US);
Kallol Bera, San Jose, CA (US);
Li-Qun Xia, Cupertino, CA (US);
Mandyam Sriram, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A heating module for use in a substrate processing chamber. The heating module having a housing with a heat source therein. The heating module can be part of a gas distribution assembly positioned above a susceptor assembly to heat the top surface of the susceptor and wafers directly. The heating module can have constant or variable power output. Processing chambers and methods of processing a wafer using the heating module are described.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile