The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Dec. 21, 2016
Tokyo Electron Limited, Tokyo, JP;
Gaku Ikeda, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A processing system includes a setting unit and a selection control unit. The setting unit is configured to set as a recipe a sequence of processing a plurality of target objects, which is unloaded from a load port, through a same transfer route and returning processed target objects to the load port. The selection control unit is configured to select, when the processing includes a recursive processing in which a target object is loaded multiples times into at least one of a plurality of process modules, an unloading start timing of a next target object from the load port based on at least one of a processing state and a transfer state of a rate-limiting process module among the respective process modules.