The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2019
Filed:
Dec. 16, 2013
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Robert H. Bettencourt, Gloucester, MA (US);
Steven C. Borichevsky, Ipswich, MA (US);
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC., Gloucester, MA (US);
Abstract
In one embodiment a vacuum assembly for an ion implanter system includes a first turbomolecular pump operatively coupled to a source chamber of the ion implanter system and a first backing line having a first end and a second end, the first end coupled to an exhaust port of the first turbomolecular pump, wherein the first turbomolecular pump and first end of the first backing line are configured to operate at a voltage potential of the source chamber. The vacuum assembly further includes a voltage insulator that is insulatively coupled to the first backing line, and a second turbomolecular pump operatively coupled to the first backing line, wherein the second turbomolecular pump is configured to operate at ground voltage potential.