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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10267360 B1

PDFFull Text
Date of Patent:
Apr. 23, 2019

Filed:

Apr. 06, 2011

Pneumatic bearing with bonded polymer film wear surface and production method thereof

Applicants:

Dragos Pariza, Stamford, CT (US);

Santiago E. Del Puerto, Milton, NY (US);

Inventors:

Dragos Pariza, Stamford, CT (US);

Santiago E. Del Puerto, Milton, NY (US);

Assignee:

ASML Holding N.V., Veldhoven, NL;

Attorney:

Sterne, Kessler, Goldstein & Fox P.L.L.C.

Primary Examiner:

Callie E Shosho

Assistant Examiner:

Krupa Shukla

Int. Cl.
CPC ...
F16C 33/02 (2006.01); B32B 27/28 (2006.01); F16C 33/20 (2006.01); F16C 43/02 (2006.01); B32B 9/00 (2006.01); B32B 9/04 (2006.01); B32B 15/08 (2006.01); B32B 15/18 (2006.01); B32B 27/08 (2006.01); B32B 27/38 (2006.01);
U.S. Cl.
CPC ...
F16C 33/02 (2013.01); B32B 9/005 (2013.01); B32B 9/045 (2013.01); B32B 15/08 (2013.01); B32B 15/18 (2013.01); B32B 27/08 (2013.01); B32B 27/28 (2013.01); B32B 27/281 (2013.01); B32B 27/38 (2013.01); F16C 33/201 (2013.01); F16C 43/02 (2013.01); B32B 2307/536 (2013.01); B32B 2307/558 (2013.01); B32B 2307/732 (2013.01); B32B 2457/08 (2013.01); Y10T 156/1052 (2015.01);
Abstract

Disclosed are pneumatic bearings with a bonded polymer film wear surface and production methods thereof. For example, a pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing has a bearing surface having a polyimide film fastened to a substrate with a bonding layer. The polyimide film can comprise poly-oxydiphenylene-pyromellitimide and the bonding layer can comprise diglycidyl ether of bisphenol A, 1,4-butanediol diglycidyl ether, and 2,2,4-trimetylhexametylen-1,6-diamin.

Find Patent Forward Citations

Pariza, Dragos. (2019). Pneumatic bearing with bonded polymer film wear surface and production method thereof (U.S. Patent No. 10267360). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10267360

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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