The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2019

Filed:

Sep. 28, 2016
Applicants:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Ningbo Semiconductor International Corporation, Ningbo, CN;

Inventors:

Ji Guang Zhu, Shanghai, CN;

Hai Ting Li, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01); H01L 21/762 (2006.01); H01L 21/311 (2006.01); H01L 21/3105 (2006.01); H01L 21/8258 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76254 (2013.01); H01L 21/02057 (2013.01); H01L 21/02236 (2013.01); H01L 21/02532 (2013.01); H01L 21/02546 (2013.01); H01L 21/02636 (2013.01); H01L 21/31051 (2013.01); H01L 21/31116 (2013.01); H01L 21/31144 (2013.01); H01L 27/1203 (2013.01); H01L 21/8258 (2013.01); H01L 21/84 (2013.01);
Abstract

A method for forming a semiconductor device includes forming a first insulator layer on a first substrate of a first semiconductor material, implanting hydrogen ions into the first substrate to form a hydrogen-implanted layer, forming a recessed region in the first substrate, forming a second semiconductor material in the recessed region, and forming a second insulator layer over the second semiconductor material and the first substrate. The method also includes providing a second substrate with a third insulator layer disposed thereon, bonding the first substrate with the second substrate, and removing a lower portion of the first substrate at the hydrogen-implanted layer. A portion of the first substrate is removed to expose a surface of the second semiconductor material in the recessed region, thereby providing a layer of the first semiconductor material adjacent to a layer of the second semiconductor material on the second insulator layer.


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