The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
Aug. 04, 2016
Atotech Deutschland Gmbh, Berlin, DE;
Atotech Deutschland GmbH, Berlin, DE;
Abstract
This invention concerns a substrate holder reception apparatus () for clamping a substrate holder () in a substrate holder clamping direction (SHCD) in a predetermined position of the substrate holder () and releasing the substrate holder (), comprising at least one substrate holder connection device () for mechanical aligning and electrically contacting of the substrate holder (), wherein the substrate holder connection device () comprises a separate substrate holder alignment device () for aligning the substrate holder () with the substrate holder connection device () in an alignment direction, and a separate substrate holder contact device () for electrically contacting the substrate holder (). Further, the invention concerns an electrochemical treatment apparatus () comprising the substrate holder reception apparatus ().