The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Sep. 23, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Anant Chimmalgi, San Jose, CA (US);
Sebaek Oh, Millbrae, CA (US);
Joshua Wittenberg, Fremont, CA (US);
Lauren Wilson, San Jose, CA (US);
Rahul Yadav, Sunnyvale, CA (US);
Ilya Bezel, Mountain View, CA (US);
Michael Navone, Cupertino, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.