The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2019

Filed:

Jun. 20, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Hui Zang, Guilderland, NY (US);

Manfred Eller, Beacon, NY (US);

Haiting Wang, Clifton Park, NY (US);

Daniel Jaeger, Saratoga Springs, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 21/3213 (2006.01); H01L 21/8234 (2006.01); H01L 27/06 (2006.01); H01L 27/02 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0629 (2013.01); H01L 21/32133 (2013.01); H01L 21/823431 (2013.01); H01L 21/823437 (2013.01); H01L 27/0207 (2013.01); H01L 28/20 (2013.01); H01L 28/24 (2013.01); H01L 29/66545 (2013.01); H01L 21/823468 (2013.01); H01L 29/4958 (2013.01); H01L 29/4966 (2013.01); H01L 29/7851 (2013.01);
Abstract

One illustrative method disclosed herein includes, among other things, forming first and second adjacent gates above a semiconductor substrate, each of the gates comprising a gate structure and a gate cap, forming a conductive resistor structure between the first and second adjacent gates, the conductive resistor structure having an uppermost surface that is positioned at a level that is below a level of an uppermost surface of the gate caps of the first and second adjacent gates, and forming first and second separate conductive resistor contact structures, each of which is conductively coupled to the conductive resistor structure.


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