The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2019

Filed:

Oct. 05, 2017
Applicant:

Mitutoyo Corporation, Kawasaki-shi, Kanagawa, JP;

Inventor:

Koji Kubo, Kawasaki, JP;

Assignee:

MITUTOYO CORPORATION, Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/50 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01);
U.S. Cl.
CPC ...
G01J 3/502 (2013.01); G01J 3/0208 (2013.01); G01J 3/10 (2013.01); G01J 2003/102 (2013.01);
Abstract

A chromatic confocal sensor includes: a light source portion that emits a plurality of light beams having different wavelengths; a plurality of optical heads that converge the plurality of light beams emitted from the light source portion at different focal positions and emit measurement light reflected by a measurement point at the focal positions; a spectrometer including a line sensor, and an optical system that includes a diffraction grating that diffracts a plurality of measurement light beams emitted from the plurality of optical heads, and emits the plurality of measurement light beams diffracted by the diffraction grating to a plurality of different light-receiving areas of the line sensor; and a position calculation portion that calculates a position of a plurality of measurement points as a measurement target of the plurality of optical heads based on a light-receiving position of the plurality of light-receiving areas of the line sensor.


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