The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2019

Filed:

Oct. 25, 2017
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Masahiro Tsukamoto, Tokyo, JP;

Ken Togashi, Tokyo, JP;

Assignee:

Disco Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B23K 26/02 (2014.01); B23K 26/10 (2006.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/687 (2013.01); B23K 26/02 (2013.01); B23K 26/10 (2013.01); H01L 21/268 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01); H01L 21/78 (2013.01);
Abstract

A frame unit is transferred from a cassette to a predetermined position. The frame unit has a platelike workpiece, a tape attached to the workpiece, and a ring frame supporting a peripheral portion of the tape. The apparatus includes a holding unit for the frame unit, a moving unit for the holding unit, and a control unit. The holding unit includes a pair of gripping portions for gripping a front portion of the ring frame at two separate positions, and an abutting portion adapted to abut against the outer circumference of the ring frame. The ring frame is gripped, partially drawn from the cassette, and released. The abutting portion is brought into abutment against the outer circumference of the ring frame so as to move the ring frame into the cassette. The ring frame is gripped again, raised, and transferred to the predetermined position.


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