The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Mar. 22, 2017
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Xin Man, Tokyo, JP;
Atsushi Uemoto, Tokyo, JP;
Abstract
A method for cross-section processing and observation, and apparatus therefor, includes performing a position information obtaining process of observing the entirety of a sample by using an optical microscope or an electron microscope, and obtaining three-dimensional position coordinate information of a particular observation target object included in the sample; performing a cross-section processing process of irradiating a particular region in which the object is present by using a focused ion beam based on the information, and exposing a cross section of the region; performing a cross-section image obtaining process of irradiating the cross section by using an electron beam, and obtaining a cross-section image of a predetermined size region including the object; and performing a three-dimensional image obtaining process of repeating the cross-section processing process and the cross-section image obtaining process at predetermined intervals in a predetermined direction, and obtaining a three-dimensional image from the multiple cross-section images.