The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Nov. 19, 2015
Asml Netherlands B.v., Veldhoven, NL;
Marinus Petrus Reijnders, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A level sensor to determine a height level of a substrate, that includes a projection unit including a projection grating having a period P, the projection grating configured to provide a patterned measurement beam, to the substrate, having a periodically varying intensity distribution in a first direction having the period P; a detection unit to receive a reflected patterned measurement beam after reflection on the substrate, the reflected patterned measurement beam having a periodically varying intensity distribution in a second direction, having the period P, wherein the detection unit has a sensor array to receive the reflected patterned measurement beam, the sensor array including a plurality of sensing elements arranged along the second direction at a pitch p smaller than or equal to half the period P, and a processing unit to determine the height level of the substrate based on a signal from the sensor.