The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Feb. 05, 2015
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/00 (2006.01); C25D 17/10 (2006.01); C25D 17/04 (2006.01); C25D 17/06 (2006.01);
U.S. Cl.
CPC ...
C25D 17/10 (2013.01); C25D 17/00 (2013.01); C25D 17/001 (2013.01); C25D 17/002 (2013.01); C25D 17/04 (2013.01); C25D 17/06 (2013.01);
Abstract
To provide an anode holder and a plating apparatus including the same, the anode holder being configured to prevent additives and black films from spreading by moving between an internal space in which an anode is provided and an external space. An anode holderaccording to the present invention includes: an internal spacethat houses an anode therein; a diaphragm configured so as to cover a front face of the internal space; a holethat is formed on an external surface of the anode holder and which communicates with the internal space; and a valvethat seals the holeshut.