The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2019
Filed:
Jun. 08, 2017
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Michel Aliman, Oberkochen, DE;
Hin Yiu Anthony Chung, Ulm, DE;
Gennady Fedosenko, Aalen, DE;
Ruediger Reuter, Aalen, DE;
Alexander Laue, Heidenheim, DE;
Achim von Keudell, Bochum, DE;
Marc Boeke, Hattingen, DE;
Thorsten Benter, Haan, DE;
Joerg Winter, Niederzier, DE;
Peter Awakowicz, Bochem, DE;
Leonid Gorkhover, Ulm, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.