Three-dimensional memory device containing fluorine-free tungsten—word lines and methods of manufacturing the same

Abstract

A method of forming a three-dimensional memory device includes forming an alternating stack of insulating layers and sacrificial material layers over a substrate, forming memory stack structures through the alternating stack, such that each of the memory stack structures includes a memory film and a vertical semiconductor channel, forming backside recesses by removing the sacrificial material layers selective to the insulating layers and the memory stack structures, forming a backside blocking dielectric layer in the backside recesses, forming an amorphous titanium oxide layer on surfaces of the backside blocking dielectric layer in the backside recesses, and forming tungsten word lines in the backside recesses using a fluorine-free tungsten-containing precursor gas.