The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 2019

Filed:

Dec. 02, 2015
Applicant:

Bruker Nano, Inc., Santa Barbara, CA (US);

Inventors:

Honghua Yang, Santa Barbara, CA (US);

Craig Prater, Santa Barbara, CA (US);

Assignee:

Bruker Nano, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/02 (2010.01); G01Q 20/02 (2010.01); G01Q 60/06 (2010.01);
U.S. Cl.
CPC ...
G01Q 30/025 (2013.01); G01Q 20/02 (2013.01); G01Q 60/06 (2013.01);
Abstract

System and method for measuring an optical property of a sub micrometer region of a sample including interacting a probe tip of a probe microscope with a region of the sample, illuminating the sample with a beam of light from a radiation source such that light is scattered from the probe-sample interaction region, interfering a reference beam with the scattered light wherein the reference beam has an adjustable optical phase, measuring with a detector at least a portion of the light scattered from probe-sample and background regions at a substantially constant reference phase, and constructing a signal indicative of the optical property of the sample wherein contributions from background scattered light are substantially suppressed.


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