The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2019
Filed:
Jul. 13, 2017
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventor:
Thomas Patrick Duffey, San Diego, CA (US);
Assignee:
CYMER LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/17 (2006.01); G01N 29/24 (2006.01); G01N 21/31 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1702 (2013.01); G01N 21/3151 (2013.01); G01N 29/2425 (2013.01); G01N 2021/1704 (2013.01); G01N 2021/1708 (2013.01);
Abstract
Disclosed is an apparatus for and method of measuring the concentration of F2 in the laser gas used in an excimer laser. Quartz Enhanced Photoacoustic Spectroscopy is used to obtain a direct measurement of F2 concentration quickly and using only a small sample volume.