The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 05, 2019

Filed:

Nov. 21, 2016
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Yasufumi Kawasuji, Oyama, JP;

Naoya Takaoka, Oyama, JP;

Toshio Yokozuka, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/102 (2006.01); H01S 3/13 (2006.01); H01S 3/10 (2006.01); H01L 21/027 (2006.01); H01S 3/097 (2006.01); H01L 21/67 (2006.01); H01S 3/09 (2006.01); H01S 3/104 (2006.01); H01S 3/23 (2006.01); H05G 2/00 (2006.01); H01S 3/134 (2006.01); H01S 3/223 (2006.01); H01S 5/34 (2006.01); H01S 5/40 (2006.01);
U.S. Cl.
CPC ...
H01S 3/102 (2013.01); H01L 21/027 (2013.01); H01L 21/67115 (2013.01); H01S 3/09 (2013.01); H01S 3/097 (2013.01); H01S 3/09702 (2013.01); H01S 3/104 (2013.01); H01S 3/2308 (2013.01); H05G 2/008 (2013.01); H01S 3/134 (2013.01); H01S 3/2232 (2013.01); H01S 3/2316 (2013.01); H01S 3/2325 (2013.01); H01S 3/2375 (2013.01); H01S 5/3401 (2013.01); H01S 5/4012 (2013.01);
Abstract

A laser apparatus may include: an optical amplifier configured to amplify a laser beam outputted from a master oscillator; an optical-amplifier power supply configured to supply an alternating current for optical amplification to the optical amplifier; and a laser controller. The optical-amplifier power supply may include: an alternating current generation circuit including an inverter circuit configured to change output amplitude in accordance with a duty cycle, the alternating current generation circuit being configured to generate the alternating current from an output of the inverter circuit; and a power supply control circuit configured to hold control information defining correspondence relations between command values from the laser controller and duty cycles of the inverter circuit, determine a duty cycle corresponding to a command value received from the laser controller based on the control information, and provide the determined duty cycle to the inverter circuit.


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Kawasuji, Yasufumi. (2019). Laser apparatus, euv light generation system, and method of controlling laser apparatus (U.S. Patent No. 10224686). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10224686

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