The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Mar. 12, 2015
Epicrew Corporation, Omura, JP;
Akira Okabe, Omura, JP;
Masanori Tanoguchi, Omura, JP;
Epicrew Corporation, , JP;
Abstract
A semiconductor wafer position display system, a semiconductor wafer position display method, and a semiconductor wafer position display program with which a deviation from an appropriate placement position of a semiconductor wafer mounted in a wafer mounting part can be displayed to a user in an easily understood manner are provided. The semiconductor wafer position display system includes: a data reception unit for receiving measurement data obtained by a semiconductor wafer position measurement device for measuring the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part; and a screen display control unit for controlling a display screen for visibly displaying the deviation from the appropriate placement position of the semiconductor wafer based on the measurement data received by the data reception unit, wherein the screen display control unit includes a circumference display screen control unit for presenting the deviation from the appropriate placement position of the semiconductor wafer by displaying a circumference of the semiconductor wafer based on the measurement data received by the data reception unit.