The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Sep. 21, 2016
Applicant:
Nissin Ion Equipment Co., Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Hideyasu Une, Billerica, MA (US);
Tetsuro Yamamoto, Billerica, MA (US);
Yoshihiro Takigami, Kyoto, JP;
Assignee:
NISSIN ION EQUIPMENT CO., LTD., Kyoto-shi, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 15/24 (2006.01); G01R 19/00 (2006.01); H01J 25/12 (2006.01);
U.S. Cl.
CPC ...
G01R 19/0061 (2013.01); G01R 15/246 (2013.01); G01R 19/0092 (2013.01); H01J 25/12 (2013.01);
Abstract
A beam current measuring device capable of performing measurement of a beam current distribution of a charged particle beam seamlessly and continuously in an arbitrary direction is provided. The beam current measuring device includes collector electrodes whose detection regions seamlessly continue in an arrangement direction thereof.