The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Sep. 23, 2016
Applicant:
Novellus Systems, Inc., Fremont, CA (US);
Inventors:
Henner W. Meinhold, Fremont, CA (US);
Dan M. Doble, Somerville, MA (US);
Stephen Yu-Hong Lau, Lake Oswego, OR (US);
Vince Wilson, Beaverton, OR (US);
Easwar Srinivasan, Beaverton, OR (US);
Assignee:
Novellus Systems, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/509 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45572 (2013.01); C23C 16/4557 (2013.01); C23C 16/45563 (2013.01); C23C 16/45565 (2013.01); C23C 16/5096 (2013.01); H01J 37/3244 (2013.01); H01J 37/32724 (2013.01);
Abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.