The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Oct. 24, 2014
Applicant:
Safc Hitech Inc., Haverhill, MA (US);
Inventors:
Ravi Kanjolia, North Andover, MA (US);
Shaun Garratt, Wirral, GB;
David Thompson, San Jose, CA (US);
Jeffrey Anthis, San Jose, CA (US);
Assignee:
MERCK PATENT GMBH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/455 (2006.01); C07F 13/00 (2006.01); C23C 16/18 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C07F 13/005 (2013.01); C23C 16/18 (2013.01); C23C 16/34 (2013.01); C23C 16/40 (2013.01); H01L 21/28556 (2013.01); H01L 21/28568 (2013.01);
Abstract
Metal complexes containing one or more amidoimine ligands, methods of making such metal complexes, and methods of using such metal complexes to prepare metal-containing films are provided.