The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Jan. 10, 2014
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Tjalf Pirk, Stuttgart, DE;

Andreas Krauss, Tuebingen, DE;

Friedjof Heuck, Stuttgart, DE;

Stefan Leidich, Rutesheim, DE;

Christoph Schelling, Stuttgart, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); H01L 41/293 (2013.01); H01L 41/297 (2013.01); H01L 41/083 (2006.01); H01L 41/27 (2013.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 41/081 (2013.01); H01L 41/083 (2013.01); H01L 41/0815 (2013.01); H01L 41/0831 (2013.01); H01L 41/27 (2013.01); H01L 41/293 (2013.01); H01L 41/297 (2013.01); H01L 21/311 (2013.01); H01L 21/31116 (2013.01); Y10T 29/42 (2015.01); Y10T 29/43 (2015.01);
Abstract

A method for producing a multi-layer electrode system includes providing a carrier substrate having a recess in a top side of the carrier substrate. At least one wall of the recess is inclined in relation to a bottom side of the carrier substrate, which is opposite to the top side. The method also includes applying a multi-layer stack, which includes at least a first electrode layer, a second electrode layer, and a piezoelectric layer arranged between the first electrode layer and the second electrode layer, to the top side of the carrier substrate. At least the wall and a bottom of the recess are covered by at least a portion of the multi-layer stack.


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