The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

May. 15, 2014
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Ya-Jung Tsai, Hsinchu, TW;

Chun-Lien Su, Hsinchu, TW;

Hsin-Fu Lin, Hsinchu, TW;

Hung-Chi Chen, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 27/11521 (2017.01); H01L 29/788 (2006.01); H01L 29/66 (2006.01); H01L 21/265 (2006.01); H01L 29/423 (2006.01); H01L 21/762 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); H01L 21/26586 (2013.01); H01L 21/762 (2013.01); H01L 29/42324 (2013.01); H01L 29/66666 (2013.01); H01L 29/66825 (2013.01); H01L 29/788 (2013.01); H01L 29/7827 (2013.01); H01L 29/7881 (2013.01);
Abstract

Provided is a method of fabricating a memory device including performing an ion implantation process by using a mask layer as an implanting mask, so as to form a first embedded doped region and a second embedded doped region in a substrate. The first embedded doped region extends along the first direction, passes through the control gate, and is electrically connected to the first doped region, the second doped region and the third doped region at two sides of control gates. The second embedded doped region extends along the second direction, is located in the substrate under the third doped region, and electrically connected to the third doped region. The first embedded doped region is electrically connected to the second embedded doped region.


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