The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Apr. 27, 2015
Applicant:
Mitsui Chemicals, Inc., Minato-ku, Tokyo, JP;
Inventors:
Kazuo Kohmura, Chiba, JP;
Yosuke Ono, Sodegaura, JP;
Daiki Taneichi, Chiba, JP;
Yasuyuki Sato, Ibara, JP;
Toshiaki Hirota, Ibara, JP;
Assignee:
MITSUI CHEMICALS, INC., Minato-Ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/22 (2012.01); G03F 1/62 (2012.01); G03F 1/64 (2012.01); G03F 7/20 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); G03F 1/22 (2013.01); G03F 1/62 (2013.01); G03F 7/2004 (2013.01); H01L 21/67359 (2013.01);
Abstract
A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.