The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Apr. 03, 2015
Applicant:

Nordson Corporation, Westlake, OH (US);

Inventors:

John Tingay, Cambridge, GB;

William T. Walker, Suffolk, GB;

Kate Donaldson-Stewart, Essex, GB;

Assignee:

Nordson Corporation, Westlake, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); H01L 21/67288 (2013.01); H01L 21/681 (2013.01); H01L 21/6838 (2013.01); H01L 22/12 (2013.01); G01N 2223/309 (2013.01); G01N 2223/6113 (2013.01); G01N 2223/6116 (2013.01); G01N 2223/6462 (2013.01);
Abstract

An x-ray inspection system includes a cabinet including an x-ray source, a sample support supporting a sample to be inspected, and an x-ray detector. The system further includes an air mover configured to force air into the cabinet through an air inlet in the cabinet above the sample support. The air mover and cabinet are configured to force air through the cabinet from the air inlet past the sample support to an air outlet in the cabinet below the sample support. The cabinet may be constructed to provide an x-ray shield. The x-ray inspection system can be used in a clean room environment to inspect items such as semiconductor wafers.


Find Patent Forward Citations

Tingay, John. (2019). X-ray inspection apparatus for inspecting semiconductor wafers (U.S. Patent No. 10215716). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10215716

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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