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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10213076 B1

PDFFull Text
Date of Patent:
Feb. 26, 2019

Filed:

Sep. 26, 2012

Particle collecting apparatus and particle collecting method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Nobuhiro Takahashi, Nirasaki, JP;

Keiko Hada, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Cantor Colburn LLP

Primary Examiner:

Douglas Lee

Int. Cl.
CPC ...
A47L 9/00 (2006.01); B08B 5/02 (2006.01); B08B 5/04 (2006.01); G01N 15/06 (2006.01); G01N 15/00 (2006.01); G01N 1/22 (2006.01);
U.S. Cl.
CPC ...
A47L 9/00 (2013.01); B08B 5/02 (2013.01); B08B 5/04 (2013.01); G01N 1/2202 (2013.01); G01N 15/06 (2013.01); G01N 2001/2223 (2013.01); G01N 2015/0046 (2013.01);
Abstract

A particle collecting apparatus is provided with a case, an ultrasonic generator, a gas supplying unit, a suction unit and a seal member. The case has one end, and defines a space at the one end. The ultrasonic generator is provided in the case, and generates ultrasonic waves towards the opening defined by the one end of the case. The gas supplying unit supplies gas to the space. The suction unit exhausts the space. The seal member has elasticity, and is provided at the one end so as to surround the opening.

Find Patent Forward Citations

Takahashi, Nobuhiro. (2019). Particle collecting apparatus and particle collecting method (U.S. Patent No. 10213076). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10213076

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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