The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Nov. 17, 2017
Applicant:
National Taiwan University of Science and Technology, Taipei, TW;
Inventors:
Bing-Joe Hwang, Taipei, TW;
Wei-Nien Su, Taipei, TW;
Jeng-Ywan Jeng, Taipei, TW;
Yuan-Han Chu, Taipei, TW;
Tse-Ming Chiu, Taipei, TW;
Hsin-Fu Teng, Taipei, TW;
Assignee:
National Taiwan University of Science and Technology, Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); H01L 21/78 (2006.01); B28D 5/04 (2006.01); H01L 21/3063 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B28D 5/04 (2013.01); H01L 21/306 (2013.01); H01L 21/3063 (2013.01); H01L 21/30604 (2013.01);
Abstract
An apparatus for cutting a substrate is disclosed. The apparatus includes a main body containing a reactive solution and the substrate; and a catalytic cutting element disposed inside the main body and contacting one of at least two adjacent cutting peripheries of the substrate to conduct a chemical reaction to cut the substrate.