The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Nov. 04, 2016
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Christopher Nemirow, San Jose, CA (US);

Neel Leslie, San Jose, CA (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/308 (2006.01); G01R 31/311 (2006.01); G01R 31/01 (2006.01); G02B 21/00 (2006.01); G01R 31/317 (2006.01);
U.S. Cl.
CPC ...
G01R 31/311 (2013.01); G01R 31/01 (2013.01); G02B 21/002 (2013.01); G01R 31/31705 (2013.01);
Abstract

Systems, methods, and computer readable media to improve integrated circuit (IC) debug operations are described. In general, techniques are disclosed for acquiring/recording waveforms across an under-test IC during a single sweep of a laser scanning microscope (LSM). More particularly, techniques disclosed herein permit the acquisition of an integrated circuit's response to a test signal at each location across the IC in real-time. In practice the test signal consists of a stimulus portion that repeats after a given period. In one embodiment, the IC's response to multiple complete stimulus portions may be averaged and digitized. In another embodiment, the IC's response to multiple partial stimulus portions may be averaged and digitized. As used herein, the former approach is referred to as waveform mapping, the latter as gated-LVI.


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