The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Jun. 03, 2016
Freescale Semiconductor, Inc., Austin, TX (US);
Aaron A. Geisberger, Austin, TX (US);
NXP USA, Inc., Austin, TX (US);
Abstract
A microelectromechanical system (MEMS) gyroscope device includes a substrate having a surface parallel to a plane; first and second proof masses driven to slide back and forth past one another in a first directional axis of the plane, where the first and second proof masses respectively have a first and second recess in a respective side closest to the other proof mass; a pivot structure coupled to the first proof mass within the first recess and to the second proof mass within the second recess; an anchor between the first and second recesses and coupled to a mid-point of the pivot structure; and third and fourth proof masses driven to move toward and away from one another in a second directional axis of the plane that is perpendicular to the first directional axis; where the proof masses move in response to angular velocity in one or more directional axes.