The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
Feb. 09, 2018
Applicant:
The Regents of the University of Colorado, a Body Corporate, Denver, CO (US);
Inventors:
Steven M. George, Boulder, CO (US);
Younghee Lee, Boulder, CO (US);
Nicholas Johnson, Louisville, CO (US);
Assignee:
The Regents of the University of Colorado, a body corporate, Denver, CO (US);
Primary Examiner:
Int. Cl.
CPC ...
C23F 4/00 (2006.01); C09K 13/10 (2006.01); C09K 13/00 (2006.01); C09K 13/08 (2006.01);
U.S. Cl.
CPC ...
C23F 4/00 (2013.01); C09K 13/00 (2013.01); C09K 13/08 (2013.01); C09K 13/10 (2013.01);
Abstract
The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises contacting a solid substrate comprising a first metal compound with an oxidant, optionally contacting the solid substrate with a second metal compound, and then contacting the modified solid substrate with a fluorinating agent, whereby ALE of the solid substrate is promoted.