logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10202707 B1

PDFFull Text
Date of Patent:
Feb. 12, 2019

Filed:

Apr. 18, 2013

Substrate processing system with lamphead having temperature management

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Joseph M. Ranish, San Jose, CA (US);

Paul Brillhart, Pleasanton, CA (US);

Satheesh Kuppurao, San Jose, CA (US);

Dongming Iu, Union City, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorneys:

Moser Taboada

Alan Taboada

Primary Examiner:

Charles Capozzi

Assistant Examiner:

Mirza Israr Javed

Int. Cl.
CPC ...
F21V 7/00 (2006.01); C30B 25/10 (2006.01);
U.S. Cl.
CPC ...
C30B 25/105 (2013.01); F21V 7/0083 (2013.01);
Abstract

Apparatus for processing a substrate are provided herein. In some embodiments, a lamphead for use in substrate processing includes a monolithic member having a contoured surface; a plurality of reflector cavities disposed in the contoured surface, wherein each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for a lamp; and a plurality of lamp passages, wherein each lamp passage extends into the monolithic member from one of the plurality of reflector cavities.

Find Patent Forward Citations

Ranish, Joseph. (2019). Substrate processing system with lamphead having temperature management (U.S. Patent No. 10202707). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10202707

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…