The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Apr. 18, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph M. Ranish, San Jose, CA (US);
Paul Brillhart, Pleasanton, CA (US);
Satheesh Kuppurao, San Jose, CA (US);
Dongming Iu, Union City, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F21V 7/00 (2006.01); C30B 25/10 (2006.01);
U.S. Cl.
CPC ...
C30B 25/105 (2013.01); F21V 7/0083 (2013.01);
Abstract
Apparatus for processing a substrate are provided herein. In some embodiments, a lamphead for use in substrate processing includes a monolithic member having a contoured surface; a plurality of reflector cavities disposed in the contoured surface, wherein each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for a lamp; and a plurality of lamp passages, wherein each lamp passage extends into the monolithic member from one of the plurality of reflector cavities.