The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 05, 2019

Filed:

May. 21, 2018
Applicant:

Nxp Usa, Inc., Austin, TX (US);

Inventor:

Philippe Renaud, Chandler, AZ (US);

Assignee:

NXP USA, INC., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 31/0256 (2006.01); H01L 29/66 (2006.01); H01L 21/266 (2006.01); H01L 21/761 (2006.01); H01L 21/762 (2006.01); H01L 21/8252 (2006.01); H01L 27/06 (2006.01); H01L 27/085 (2006.01); H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 21/265 (2006.01); H01L 27/092 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66462 (2013.01); H01L 21/266 (2013.01); H01L 21/26546 (2013.01); H01L 21/761 (2013.01); H01L 21/76224 (2013.01); H01L 21/8252 (2013.01); H01L 27/0605 (2013.01); H01L 27/085 (2013.01); H01L 29/2003 (2013.01); H01L 29/66431 (2013.01); H01L 29/778 (2013.01); H01L 29/7786 (2013.01); H01L 27/092 (2013.01);
Abstract

An embodiment of a complementary GaN integrated circuit includes a GaN layer with a first bandgap. A second layer with a second bandgap is formed on the GaN layer, resulting in a 2DEG in a contact region between the GaN layer and the second layer. The second layer has a relatively thin portion and a relatively thick portion. A third layer is formed over the relatively thick portion of the second layer. The third layer has a third bandgap that is different from the second bandgap, resulting in a 2DHG in a contact region between the second layer and the third layer. A transistor of a first conductivity type includes the 2DHG, the relatively thick portion of the second layer, and the third layer, and a transistor of a second conductivity type includes the 2DEG and the relatively thin portion of the second layer.


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