The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Aug. 11, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Nobuto Kawahara, Utsunomiya, JP;
Yoshikazu Miyajima, Utsunomiya, JP;
Zhengmao Ye, Austin, TX (US);
Anshuman Cherala, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Xiaoming Lu, Cedar Park, TX (US);
Kang Luo, Austin, TX (US);
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus includes a substrate holder including a plurality of chucking regions for chucking a substrate, and a controller that controls chucking forces of the chucking regions. The chucking regions include a first chucking region for chucking a periphery of a first substrate having a first diameter, a second chucking region for chucking a periphery of a second substrate having a second diameter larger than the first diameter, a third chucking region group divided into a plurality of regions inside the first chucking region, and a fourth chucking region group divided into a plurality of regions between the first chucking region and the second chucking region. The controller controls the chucking forces of each of the chucking regions.