The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Mar. 06, 2014
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/70 (2006.01); G03F 7/20 (2006.01); G02B 7/02 (2006.01); G02B 7/00 (2006.01); G02B 7/182 (2006.01); G02B 17/06 (2006.01); G02B 19/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70825 (2013.01); G02B 7/00 (2013.01); G02B 7/021 (2013.01); G02B 7/023 (2013.01); G02B 7/026 (2013.01); G02B 7/182 (2013.01); G02B 17/0605 (2013.01); G02B 19/0023 (2013.01); G03F 7/70833 (2013.01); G02B 17/0615 (2013.01);
Abstract
An optical module includes: a first holding device with a circumference extending in a first circumferential direction; and a plurality of first supporting devices configured to support a first optical element, the first supporting devices being fixed at the circumference of the first holding device. Along the first circumferential direction, at least one of the first supporting devices is located in a non-equidistant manner between two neighboring first supporting devices. The optical module is configured to be used in a microlithography objective.