The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Mar. 22, 2016
Applicant:
Bruker Nano, Inc., Santa Barbara, CA (US);
Inventor:
Chanmin Su, Ventura, CA (US);
Assignee:
Bruker Nano, Inc., Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/00 (2010.01); B82Y 35/00 (2011.01); G01Q 10/06 (2010.01); G01Q 70/06 (2010.01); G01Q 60/32 (2010.01); G01Q 60/36 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/00 (2013.01); B82Y 35/00 (2013.01); G01Q 10/065 (2013.01); G01Q 60/32 (2013.01); G01Q 60/36 (2013.01); G01Q 70/06 (2013.01);
Abstract
An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.