The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2019
Filed:
Mar. 25, 2016
Applicant:
Mitsubishi Materials Corporation, Tokyo, JP;
Inventors:
Assignee:
MITSUBISHI MATERIALS CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 18/00 (2006.01); H01G 4/12 (2006.01); C04B 35/491 (2006.01); C23C 18/12 (2006.01); H01L 41/187 (2006.01); H01L 41/318 (2013.01); C04B 35/622 (2006.01);
U.S. Cl.
CPC ...
B32B 18/00 (2013.01); C04B 35/491 (2013.01); C04B 35/62218 (2013.01); C23C 18/1216 (2013.01); C23C 18/1225 (2013.01); C23C 18/1254 (2013.01); H01G 4/1245 (2013.01); H01L 41/1876 (2013.01); H01L 41/318 (2013.01); C04B 2235/3201 (2013.01); C04B 2235/3203 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/441 (2013.01); C04B 2235/449 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/72 (2013.01); C04B 2235/75 (2013.01); C04B 2235/768 (2013.01); C04B 2237/346 (2013.01); C04B 2237/704 (2013.01);
Abstract
A ferroelectric film a plurality of fired films is provided. E each of the plurality of fired films is made of metal oxide in a perovskite structure including Pb, Zr, and Ti, a total content of Li, Na, and K in the each of the plurality of fired films is 3 mass ppm or less, and the total content of Li, Na, and K on one surface of each of the plurality of fired films is 5 times or more of the total concentration of Li, Na, and K on other surface of each of the plurality of fired films.