The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Sep. 08, 2016
Asml Netherlands B.v., Veldhoven, NL;
Satish Achanta, Leuven, BE;
Tiannan Guan, Best, NL;
Raymond Wilhelmus Louis LaFarre, Helmond, NL;
Ilya Malakhovsky, Eindhoven, NL;
Bas Johannes Petrus Roset, Eindhoven, NL;
Siegfried Alexander Tromp, Knegsel, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate table to support a substrate, the substrate table including a main body, burls extending from the main body and having first upper ends that define a support surface to support the substrate, and support pins having second upper ends. The support pins are movable between a retracted position and an extended position. The support pins are arranged to support the substrate in the extended position. The support pins are arranged to be switched to a first stiffness mode and a second stiffness mode. In the first stiffness mode, the support pins have a first stiffness in a direction parallel to the support surface. In the second stiffness mode, the support pins have a second stiffness in the direction parallel to the support surface. The first stiffness is different from the second stiffness.