The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Feb. 22, 2016
Asml Netherlands B.v., Veldhoven, NL;
Jan Steven Christiaan Westerlaken, Heesch, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
Fransiscus Mathijs Jacobs, Asten, NL;
Jeroen Arnoldus Leonardus Johannes Raaymakers, Oirschot, NL;
Frank Pieter Albert Van Den Berkmortel, Deurne, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A measurement system for a lithographic apparatus includes a sub-frame compliantly mounted on a reference frame. A measurement device, e.g. an alignment sensor, is mounted on the sub-frame. Soft mounting of the sub-frame isolates the alignment sensor from high-frequency disturbances, e.g. acoustic noise, by acting as a low-pass filter with a cut-off frequency, e.g. in the range of from 100 to 200 Hz.