The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2019
Filed:
Jul. 10, 2015
Asml Netherlands B.v., Veldhoven, NL;
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Dirk Hendrikus Marinus Engelen, Leende, NL;
Peter Michel Silvester Maria Heijmans, Weert, NL;
Simon Bernardus Cornelis Maria Martens, Waalre, NL;
Hans Butler, Best, NL;
Antonius Franciscus Johannes De Groot, Someren, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An actuator includes coil assemblies arranged in an array, wherein each coil assembly defines a core chamber having a core chamber height; and at least one magnetic member that extends partly along the core chamber height of the core chamber of a corresponding at least one coil assembly, wherein the at least one magnetic member is made of a magnetic material. A shape of the at least one magnetic member, a size of the at least one magnetic member, a position of the at least one magnetic member and/or the magnetic material of the at least one magnetic member may be selected so as to control one or more parameters of the actuator.