The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Apr. 19, 2016
Asml Netherlands B.v., Veldhoven, NL;
Ferry Zijp, Nuenen, NL;
Duygu Akbulut, Eindhoven, NL;
Peter Danny Van Voorst, Nijmegen, NL;
Jeroen Johan Maarten Van De Wijdeven, Eindhoven, NL;
Koos Van Berkel, Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method involving providing incident radiation of a first polarization state by an optical component into an interface of an object with an external environment, wherein a surface is provided adjacent the interface and separated by a gap from the interface, detecting, from incident radiation reflected from the interface and from the surface, radiation of a second different polarization state arising from the reflection of incident radiation of the first polarization at the interface as distinct from the radiation of the first polarization state in the reflected radiation, and producing a position signal representative of a relative position between the focus of the optical component and the object.