The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 15, 2019

Filed:

Jan. 07, 2015
Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Yasutaka Toyoda, Tokyo, JP;

Hiroyuki Sindo, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 15/00 (2006.01); G01N 23/203 (2006.01); G01N 23/2251 (2018.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01B 15/00 (2013.01); G01N 23/203 (2013.01); G01N 23/2251 (2013.01); G01B 2210/56 (2013.01); G01N 2223/6116 (2013.01); H01L 22/12 (2013.01);
Abstract

In order to provide a pattern-measuring device and a computer program that quantitatively evaluate the effects brought about by the presence of pattern deformations in a circuit, this invention proposes a pattern-measuring device that measures first distances between first edges in pattern data being measured and second edges that correspond to said first edges in a benchmark pattern that corresponds to the pattern being measured. Said pattern-measuring device computes a score for the first edges or the pattern being measured on the basis of the first distances and second distances between the first edges and/or the second edges and third edges that are adjacent to but different from the first and second edges.


Find Patent Forward Citations

Toyoda, Yasutaka. (2019). Pattern-measuring device and computer program (U.S. Patent No. 10180317). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10180317

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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